氣體質量流量計CMS系列是使用了山武獨自開發的超微小流速傳感器—UF（microflow）傳感器的新一代氣體質量流量計。這一傳感器是一個芯片型感熱式質量流量傳感器，直接安裝于流體管路中，可以測量極低流速的流體流量，使CMS具有100:1高測量比。UF傳感器無以倫比的**性能，加上獨自開發的整流機構，使得本產品以相當于浮子式流量計的價格實現了高精度、高分辨率、寬測量范圍的氣體質量流量測量。
CMS氣體流量計特點：
1：由于采用直接質量流量測量，因此實現了不受溫度、壓力變動影響的精榷測量

2：實現了3%RD的高精度，0.5%FS的重復性、100:1的高量程能力，同時也滿足了低價格的要求

3：CMS具有瞬時、累計流量顯示、模擬輸出、累計脈沖輸出、事件輸出2點、模擬輸出定標功能以及RS-485通信功能

4：采用獨特的管內壁測量方式，實現了500PA（CMS200一次壓力49KPA）的低壓力損失.

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